Microstructure and Tribological Performances of Highly Hard Graphite-like Carbon Films Doped with Different Metals

Graphite-like carbon (GLC) films doped with Ti, Cr and Zr were fabricated successfully using magnetron sputtering technique. The effects of metal doped on microstructure and tribological performance in different environment of GLC films were investigated systematically. Results showed that the content of sp2 bonds in GLC films increased when metals were doped，while the as-deposited metal doped GLC films were apt to form column-like structure when metals were deposited too fast, and then the films would be loose and rough. The highly hard GLC films exhibited excellent self-adapted friction reducing and antiwear properties both in ambient and water environment. If metals were doped properly, they would increase the hardness and decrease the friction coefficient in dry sliding condition for GLC films. While the friction coefficient of GLC film in water would increase after doping metals. The antiwear property of GLC films was highly related to the film density and hardness. Dense and hard films wear slightly.