XPS Characterization and Tribological Behaviors of Organicsilicone Self-assembled Film and Organicsilicone/TiO_2 Composite Film

Ultrathin film composed of titanium dioxide and silicone coupling reagent molecules has been fabricated on single crystal silicon by molecular self assembly process. X ray photoelectron spectroscopy (XPS) analysis shows that composite film was successfully prepared. The results of friction and wear test show that the composite self assembly film can decrease the friction coefficient of single crystal silicon significantly. However, the strength of the composite film is not good.