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The Influence of Processing Parameters on the Properties of PECVD TiN Coating[J]. TRIBOLOGY, 1991, 11(1).
Citation:
The Influence of Processing Parameters on the Properties of PECVD TiN Coating[J]. TRIBOLOGY, 1991, 11(1).
The Influence of Processing Parameters on the Properties of PECVD TiN Coating[J]. TRIBOLOGY, 1991, 11(1).
Citation:
The Influence of Processing Parameters on the Properties of PECVD TiN Coating[J]. TRIBOLOGY, 1991, 11(1).
The Influence of Processing Parameters on the Properties of PECVD TiN Coating
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