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CN  62-1224/O4

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Effect of Processing Variables on the Composition and Microstructure of lon Beam Enhanced Deposition SisN4 Film[J]. TRIBOLOGY, 1995, 15(2): 97-103.
Citation: Effect of Processing Variables on the Composition and Microstructure of lon Beam Enhanced Deposition SisN4 Film[J]. TRIBOLOGY, 1995, 15(2): 97-103.
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Effect of Processing Variables on the Composition and Microstructure of lon Beam Enhanced Deposition SisN4 Film

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