Microstructure and Tribological Properties of Ti_1-xAl_xN Films Fabricated by Double -targeted Co-Sputtering

Ti-Al-N films with various chemical compositions were fabricated on 4OCr steel by changing the relative substrate position to targets using double-targeted reactive magnetron sputtering in one same process . EDS , AFM and XRD were used to characterize the composition , roughness and microstructure of films . Tribological performance of films was tested in air without any lubricant on a UMT-3 multifunctional friction and wear tribometer . Chemical composition of films varied with substrate position from Ti0.82Al0.18NtoTi0.12Al0.88N.XRD results indicated that before heat treatment sputtered films were amorphous. However , different phases such as TIN , AIN and TIAIN were formed in films with different compositions after heat treatment of 700℃ x 1 h . Surface roughness of films also indicated different growth modes of films with different chemical compositions. Friction and wear tests indicated the best tribological performance of films was obtained atx = 0.57,0.65 because of its hard phase , smooth surface and transfer layer .