Study on Tribological Behavior of Al/AlN Multilayers

Al/AIN muhilayers were prepared by cylindrical DC magnetron sputtering method. The hardness of the Al/AIN multilayer films was determined using a nano-indentation tester. The wear properties of the films were measured by a UMT-2MT tester in reciprocating mode. The tribological properties of the Al/AIN multilayers showed obvious enhancement in the Al/AIN layer thickness ratio of 2.9/1.1 compared to the thick AIN layer in modulation period. With the same Al/AIN layer thickness ratio but varying modulation period, the film exhibited low friction coefficient, but it also exhibited poor tribological performance at high load due to its low hardness.