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CN  62-1224/O4

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Effect of Corrosion Inhibitor in the Chemical Mechanical Polishing of Copper[J]. TRIBOLOGY, 2007, 27(5): 401-405.
Citation: Effect of Corrosion Inhibitor in the Chemical Mechanical Polishing of Copper[J]. TRIBOLOGY, 2007, 27(5): 401-405.
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Effect of Corrosion Inhibitor in the Chemical Mechanical Polishing of Copper

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