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Research Progress in Tribo-Electrochemistry and Tribo-Electrochemical Polishing[J]. TRIBOLOGY, 2006, 26(1): 92-96.
Citation: Research Progress in Tribo-Electrochemistry and Tribo-Electrochemical Polishing[J]. TRIBOLOGY, 2006, 26(1): 92-96.
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Research Progress in Tribo-Electrochemistry and Tribo-Electrochemical Polishing

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  • Received Date: January 12, 2005
  • Revised Date: March 16, 2005
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  • A review is given on the current state and recent progress in the research of tribo-electrochemistry in aqueous media and non-aqueous media, respectively, with special attention being paid to the triboelectrochemical mechanisms for the control of friction and wear. Along with a summary on the conventional polishing principles of hard and brittle materials, the tribo-electrochemical polishing method is proposed. Preliminary test results show that tribo-electrochemical polishing is promising to become the critical technology in the high efficient polishing and planarization of microelectronic materials.
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