ISSN 1004-0595
CN 62-1224/O4
ISSN 1004-0595
CN 62-1224/O4
| Citation: |
CHEN Yanjun, SU Fenghua, SUN Jianfang, CHEN Zeda, LIN Songsheng, LI Zhujun. High Temperature Tribological Behaviours of Silicon Doped Diamond-Like Films Produced by Hybrid HiPIMS-MFMS Co-Sputtering[J]. Tribology, 2024, 44(1): 18−29. DOI: 10.16078/j.tribology.2022208
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Element doping is an important way to improve the thermal stability and tribological properties of diamond like carbon (DLC) films. In this paper, silicon doped hydrogen-free diamond-like carbon (Si-DLC) films with different Si contents were deposited on AISI 304 stainless steel substrate by a hybrid high-power impulse magnetron sputtering and mid-frequency magnetron sputtering (HiPIMS-MFMS) co-sputtering system. The effects of Si contents on the microstructure, mechanical and tribological properties of DLC films were systematically studied by atomic force microscope (AFM), scanning electron microscope (SEM), X-ray diffraction (XRD), Raman spectroscopy, nano-indentation and UMT-TriboLab friction testing machine. The friction and wear mechanism of Si-DLC films at high temperature atmosphere was emphatically discussed. The results showed that Si atoms were randomly distributed in the amorphous DLC matrix in the form of tetrahedral silicon carbide, which effectively enhanced the toughness of the films. At the same time, the study also found that Si doping made the atomic structure of Si-DLC films changed more from graphite to diamond structure, thus improved the hardness of the films to a certain extent. In addition, the atomic clusters formed during doping increased the surface roughness of the films. The room temperature friction and wear results showed that the tribological properties of the films were improved by the appropriate amount of Si doping. When atom fraction of Si was 15.38%, the friction coefficient and wear rate of Si-DLC film at room temperature were the lowest. The high temperature friction results showed that the addition of silicon significantly enhanced the high temperature resistance and tribological properties of the film. The friction coefficient of Si-DLC film could also maintain a low value (about 0.1) at 300 ℃. It was due to the tetrahedral silicon carbide structure in Si-DLC films could improve the stability of sp3 bond. At the same time, the form of silicon oxide protective layer in Si-DLC film surface during high temperature friction process could slow down the oxidation of Si-DLC films and transition layer, so that the films could maintain a low friction coefficient and wear rate until 300 ℃. In addition, the large number of transfer films observed on the dual sphere was also an important reason for the low friction coefficient of the films. With the further increase of atom fraction of Si to 24.62%, the mechanical properties of Si-DLC films were improved, but the tribological properties of the films were decreased significantly. The main reason was that when Si content in Si-DLC film was too high, the high temperature friction in the air was easy to aggravate the oxidation of the films, thus generating more silicon oxide. The formation of excessive silicon oxide damaged the original structure of Si-DLC film, resulting in a significant degradation in the friction performance the films.
| [1] |
Franz R, Mitterer C. Vanadium containing self-adaptive low-friction hard coatings for high-temperature applications: a review[J]. Surface and Coatings Technology, 2013, 228: 1–13. doi: 10.1016/j.surfcoat.2013.04.034
|
| [2] |
Tang Sufang, Hu Chenglong. Design, preparation and properties of carbon fiber reinforced ultra-high temperature ceramic composites for aerospace applications: a review[J]. Journal of Materials Science & Technology, 2017, 33(2): 117–130. doi: 10.1016/j.jmst.2016.08.004
|
| [3] |
薛群基, 吕晋军. 高温固体润滑研究的现状及发展趋势[J]. 摩擦学学报, 1999, 19(1): 91–96]. doi: 10.16078/j.tribology.1999.01.018
Xue Qunji, Lv Jinjun. Research status and developing trend of solid lubrication at high temperatures[J]. Tribology, 1999, 19(1): 91–96 doi: 10.16078/j.tribology.1999.01.018
|
| [4] |
薛群基, 王立平. 类金刚石碳基薄膜材料[M]. 北京: 科学出版社, 2012].
Xue Qunji, Wang Liping. Diamond-like carbon-based thin film materials[M]. Beijing: Science Press, 2012
|
| [5] |
Al Mahmud K A H, Kalam M A, Masjuki H H, et al. An updated overview of diamond-like carbon coating in tribology[J]. Critical Reviews in Solid State and Materials Sciences, 2015, 40(2): 90–118. doi: 10.1080/10408436.2014.940441
|
| [6] |
崔龙辰, 余伟杰. 类金刚石碳薄膜的高温摩擦学研究进展[J]. 表面技术, 2019, 48(12): 150–159]. doi: 10.16490/j.cnki.issn.1001-3660.2019.12.017
Cui Longchen, Yu Weijie. Progress on high-temperature tribology of diamond-like carbon films[J]. Surface Technology, 2019, 48(12): 150–159 doi: 10.16490/j.cnki.issn.1001-3660.2019.12.017
|
| [7] |
Decrozant-Triquenaux J, Pelcastre L, Courbon C, et al. High temperature tribological behaviour of PVD coated tool steel and aluminium under dry and lubricated conditions[J]. Friction, 2021, 9(4): 802–821. doi: 10.1007/s40544-020-0435-7
|
| [8] |
Evaristo M, Fernandes F, Cavaleiro A. Room and high temperature tribological behaviour of W-DLC coatings produced by DCMS and hybrid DCMS-HiPIMS configuration[J]. Coatings, 2020, 10(4): 319. doi: 10.3390/coatings10040319
|
| [9] |
Efeoglu İ, Keleş A, Totik Y, et al. Tribological behaviour of Ti: Ta-DLC films under different tribo-test conditions[C]//IOP Conference Series: Materials Science and Engineering, Turkey, 2018, 295: 012005.
|
| [10] |
Wei Xubing, Chen Lin, Zhang Minglan, et al. Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD[J]. Diamond and Related Materials, 2020, 110: 108102. doi: 10.1016/j.diamond.2020.108102
|
| [11] |
Wang Junjun, Pu Jibin, Zhang Guangan, et al. Tailoring the structure and property of silicon-doped diamond-like carbon films by controlling the silicon content[J]. Surface and Coatings Technology, 2013, 235: 326–332. doi: 10.1016/j.surfcoat.2013.07.061
|
| [12] |
Deng Xingrui, Kousaka H, Tokoroyama T, et al. Thermal stability and high-temperature tribological properties of a-C: H and Si-DLC deposited by microwave sheath voltage combination plasma[J]. Tribology Online, 2013, 8(4): 257–264. doi: 10.2474/trol.8.257
|
| [13] |
吴行阳, 陈腾, 葛宙, 等. 不同湿度条件下N、Si共掺杂DLC膜的摩擦学性能研究[J]. 摩擦学学报, 2017, 37(4): 501–509]. doi: 10.16078/j.tribology.2017.04.012
Wu Xingyang, Chen Teng, Ge Zhou, et al. Tribological properties of N and Si co-doped DLC films under different humidity conditions[J]. Tribology, 2017, 37(4): 501–509 doi: 10.16078/j.tribology.2017.04.012
|
| [14] |
Monteiro O R, Delplancke-Ogletree M P. Investigation of non-hydrogenated DLC: Si prepared by cathodic arc[J]. Surface and Coatings Technology, 2003, 163–164: 144–148.
|
| [15] |
Wang Junjun, Pu Jibin, Zhang Guangan, et al. Architecture of superthick diamond-like carbon films with excellent high temperature wear resistance[J]. Tribology International, 2015, 81: 129–138. doi: 10.1016/j.triboint.2014.08.017
|
| [16] |
Guo Chaoqian, Lin Songsheng, Gao Di, et al. Modulation of Si on microstructure and tribo-mechanical properties of hydrogen-free DLC films prepared by magnetron sputtering[J]. Applied Surface Science, 2020, 509: 145381. doi: 10.1016/j.apsusc.2020.145381
|
| [17] |
Kimura T, Kamata H, Nakao S, et al. Preparation of titanium-doped diamond-like carbon films with electrical conductivity using high power pulsed magnetron sputtering system with bipolar pulse voltage source for substrate[J]. IEEE Transactions on Plasma Science, 2016, 44(12): 3083–3090. doi: 10.1109/TPS.2016.2587750
|
| [18] |
左潇, 孙丽丽, 汪爱英, 等. 高功率脉冲磁控溅射制备非晶碳薄膜研究进展[J]. 表面技术, 2019, 48(9): 53–63]. doi: 10.16490/j.cnki.issn.1001-3660.2019.09.004
Zuo Xiao, Sun Lili, Wang Aiying, et al. Research progress on preparation of amorphous carbon thin films by high power impulse magnetron sputtering[J]. Surface Technology, 2019, 48(9): 53–63 doi: 10.16490/j.cnki.issn.1001-3660.2019.09.004
|
| [19] |
Olejníček J, Hubička Z, Kment Š, et al. Investigation of reactive HiPIMS + MF sputtering of TiO2 crystalline thin films[J]. Surface and Coatings Technology, 2013, 232: 376–383. doi: 10.1016/j.surfcoat.2013.05.038
|
| [20] |
Diyatmika W, Liang Feike, Lou B S, et al. Superimposed high power impulse and middle frequency magnetron sputtering: role of pulse duration and average power of middle frequency[J]. Surface and Coatings Technology, 2018, 352: 680–689. doi: 10.1016/j.surfcoat.2017.11.057
|
| [21] |
Lou B S, Chen Weiting, Diyatmika W, et al. Effect of target poisoning ratios on the fabrication of titanium oxide coatings using superimposed high power impulse and medium frequency magnetron sputtering[J]. Surface and Coatings Technology, 2021, 421: 127430. doi: 10.1016/j.surfcoat.2021.127430
|
| [22] |
Meškinis Š, Čiegis A, Vasiliauskas A, et al. Annealing effects on structure and optical properties of diamond-like carbon films containing silver[J]. Nanoscale Research Letters, 2016, 11(1): 146. doi: 10.1186/s11671-016-1362-4
|
| [23] |
Yu Weijie, Huang Weijiu, Wang Junjun, et al. High-temperature tribological performance of the Si-gradually doped diamond-like carbon film[J]. Vacuum, 2021, 191: 110387. doi: 10.1016/j.vacuum.2021.110387
|
| [24] |
Jantschner O, Field S K, Holec D, et al. Origin of temperature-induced low friction of sputtered Si-containing amorphous carbon coatings[J]. Acta Materialia, 2015, 82: 437–446. doi: 10.1016/j.actamat.2014.09.030
|
| [25] |
Jantschner O, Field S K, Music D, et al. Sputtered Si-containing low-friction carbon coatings for elevated temperatures[J]. Tribology International, 2014, 77: 15–23. doi: 10.1016/j.triboint.2014.04.006
|
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