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LIU Tonggang, YOU Kun, ZHAO Kangkang, MUHAMMAD Chhattal. Preparation and Microtribological Properties of Self-assembling Composite Films on Silicon Substrate[J]. TRIBOLOGY, 2019, 39(4): 444-451. DOI: 10.16078/j.tribology.2018175
Citation: LIU Tonggang, YOU Kun, ZHAO Kangkang, MUHAMMAD Chhattal. Preparation and Microtribological Properties of Self-assembling Composite Films on Silicon Substrate[J]. TRIBOLOGY, 2019, 39(4): 444-451. DOI: 10.16078/j.tribology.2018175

Preparation and Microtribological Properties of Self-assembling Composite Films on Silicon Substrate

Funds: The project was supported by Project Funded by the Priority Academic Program Development of Jiangsu Higher Education Institutions and the Fundamental Research Funds for the Central Universities (2012QNA32)
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  • Corresponding author:

    LIU Tonggang, E-mail: nano@cumt.edu.cn, Tel: +86-15005209098

  • Received Date: November 18, 2018
  • Revised Date: February 21, 2019
  • Accepted Date: March 04, 2019
  • Available Online: June 21, 2019
  • Published Date: July 27, 2019
  • Self-assembling composite monolayers of 3-aminopropyl triethoxysilane (APS) and dodecyl trimethoxysilane (WD-10) were coated on the surface of silicon substrate by coadsorption method. Molecular dynamics was used to simulate the interfacial binding energy of the mixed system at elevated temperatures and under different molecule ratios. And nine different experimental conditions were designed by orthogonal design according to the simulation results. The surface morphologies, wettability and chemical composition of SAMs were characterized by atomic force microscopy, contact angle tester and X-ray photoelectron spectroscopy, the results showed that silane molecules were successfully fabricated on the surface of the hydroxylated silicon substrate and the best quality of the SAMs was obtained at 25 ℃ for assembly temperature, 4 h for assembly time and 6 for the pH of the solution. Besides, the microtribological properties of SAMs were evaluated on a microtribometer and the worn surface were investigated by scanning electron microscope. Compared with the hydroxylated substrate, the SAMs caused boundary lubrication effect and reduced the friction and wear on the surface of the specimens. And the lowest friction coefficient and smallest width of wear were achieved at 1:1 for the ratio of APS to WD-10.
  • [1]
    Xu-Hui Li. Status of development and application of MEMS technology[J]. Transducer & Microsystem Technologies, 2006, 25(5): 7–9.
    [2]
    Zhang W, Zhang D C, Wang Y Y. Survey and development of MEMS[J]. Semiconductor Information, 2002, 119(1-3): 107–115.
    [3]
    Mohamed Gad-el-Hak. 微机电系统基础 (赵永梅, 段瑞飞, 季安译)[M]. 北京: 机械工业出版社, 2017

    Mohamed Gad-el-Hak. Foundation of MEMS (Zhao Yongmei,Duan Ruifei,Ji An translation)[M]. Beijing: Machinery Industry Press, 2017(in Chinese)
    [4]
    陈勇华. 微机电系统的研究与展望[J]. 电子机械工程, 2011, 27(3): 1–7 doi: 10.3969/j.issn.1008-5300.2011.03.001

    Chen Yonghua. Research and prospect of MEMS[J]. Electronic Mechanical Engineering, 2011, 27(3): 1–7 doi: 10.3969/j.issn.1008-5300.2011.03.001
    [5]
    严宇才, 张端. 微机电系统技术的研究现状和展望[J]. 电子工业专用设备, 2011, 40(4): 1–8 doi: 10.3969/j.issn.1004-4507.2011.04.001

    Yan Yucai, Zhang Duan. Research status and prospect of micro-electro-mechanical system technology[J]. Special Equipment for Electronics Industry, 2011, 40(4): 1–8 doi: 10.3969/j.issn.1004-4507.2011.04.001
    [6]
    雒建斌, 何雨, 温诗铸, 等. 微/纳米制造技术的摩擦学挑战[J]. 摩擦学学报, 2005, 25(3): 283–288 doi: 10.3321/j.issn:1004-0595.2005.03.020

    Luo Jianbin, He Yu, Wen Shizhu, et al. Challenges to tribology arisen from the development of micro- and nano-manufacturing technology[J]. Tribology, 2005, 25(3): 283–288 doi: 10.3321/j.issn:1004-0595.2005.03.020
    [7]
    Komvopoulos K. Surface engineering and microtribology for microelectromechanical systems[J]. Wear, 1996, 200(1-2): 305–327. doi: 10.1016/S0043-1648(96)07328-0
    [8]
    Bhushan B, Kulkarni A V, Boehm M, et al. Microtribological characterization of self-assembled and langmuir-blodgett monolayers by atomic and friction force microscopy[J]. Langmuir, 1995, 11(8): 3189–3198. doi: 10.1021/la00008a052
    [9]
    Kang Z, Liu Q, Liu Y. Preparation and micro-tribological property of hydrophilic self-assembled monolayer on single crystal silicon surface[J]. Wear, 2013, 303(1-2): 297–301. doi: 10.1016/j.wear.2013.03.026
    [10]
    柴智敏. 原子层沉积薄膜摩擦特性研究[D]. 北京: 清华大学, 2014

    Chai Zhimin. Tribology study of atomic layer deposited films[D]. Beijing: Tsinghua University, 2014(in Chinese)
    [11]
    Liu Q, hang Z X. Preparation and micro-tribological property of hydrophobic organic films on the surface of Mg-Mn-Ce magnesium alloy[J]. Progress in Organic Coatings, 2015, 84: 42–49. doi: 10.1016/j.porgcoat.2015.02.015
    [12]
    吴健. 硅基MEMS器件的液体润滑及纳米磁性液体磁控润滑研究[D]. 徐州: 中国矿业大学, 2015

    Wu Jian. Study on the lubrication of MEMS device by liquid and magnetic field controlled ferrofluid[D]. Xuzhou: China University of Mining and Technology, 2015(in Chinese)
    [13]
    Houston J E, Doelling C M, Vanderlick T K, et al. Comparative study of the adhesion, friction, and mechanical properties of CF3- and CH3-terminated alkanethiol monolayers[J]. Langmuir, 2002, 35(7): 3926–3932. doi: 10.1002/chin.200236290
    [14]
    崔宝凤, 周惠娣, 张俊彦, 等. 聚酰胺胺类树枝形聚合物(PAMAM)插入式自组装膜的制备与摩擦学性能: 小分子链长的影响[J]. 摩擦学学报, 2011, 31(1): 1–6 doi: 10.16078/j.tribology.2011.01.001

    Cui Baofeng, Zhou Huidi, Zhang Junyan, et al. Preparation and tribological properties of inserted PAMAMS SAMs: influence of chain length[J]. Tribology, 2011, 31(1): 1–6 doi: 10.16078/j.tribology.2011.01.001
    [15]
    王莹, 王立平, 薛群基. 多烷基环戊烷/有机硅烷双层膜的制备及摩擦学性能研究[J]. 摩擦学学报, 2010, 30(5): 437–442 doi: 10.16078/j.tribology.2010.05.008

    Wang Ying, Wang Liping, Xue Qunji. Preparation and tribological properties of multiply- alkylated cyclopentane/(3-aminopropyl) triethoxylsilane double-layer film on silicon[J]. Tribology, 2010, 30(5): 437–442 doi: 10.16078/j.tribology.2010.05.008
    [16]
    刘思思, 张言, 童佳威. 双层自组装分子/离子液体复合润滑薄膜的制备及其摩擦学性能研究[J]. 摩擦学学报, 2017, 37(1): 107–114 doi: 10.16078/j.tribology.2017.01.014

    Liu Sisi, Zhang Yan, Tong Jiawei. Preparation and tribological properties of dual self-assembled monolayers/ionic liquids composite lubricating films[J]. Tribology, 2017, 37(1): 107–114 doi: 10.16078/j.tribology.2017.01.014
    [17]
    Huo L, Du P, Zhou H, et al. Fabrication and tribological properties of self-assembled monolayer of n-alkyltrimethoxysilane on silicon: Effect of SAM alkyl chain length[J]. Applied Surface Science, 2017, 396: S0169433216324096. doi: 10.1016/j.apsusc.2016.11.049
    [18]
    冯宇飞, 陈旗湘, 马亮, 等. 薄膜结合能测量技术的最新进展[J]. 科技信息, 2014(12): 8–9, 11 doi: 10.3969/J.ISSN.1671-6027.2014.12.005

    Feng Yufei, Chen Qixiang, Ma Liang, et al. Recent advances in thin film binding energy measurement technology[J]. Science and Technology Information, 2014(12): 8–9, 11 doi: 10.3969/J.ISSN.1671-6027.2014.12.005
    [19]
    张鲁格, 薛泽旭, 张翀, 等. 分子动力学模拟3(5)-(9-蒽基)吡唑分子在自组装膜上的选择性沉积[J]. 高等学校化学学报, 2016, 37(3): 505–512 doi: 10.7503/cjcu20150781

    Zhang L, Xue Z, Zhang C, et al. Molecular dynamics studies on the selective deposition of 3(5)-(9-anthryl) pyrazole onto self-assembled monolayers[J]. Chemical Journal of Chinese Universities, 2016, 37(3): 505–512 doi: 10.7503/cjcu20150781
    [20]
    孙远洋.硅烷混合自组装膜的制备及其摩擦学性能研究[D]. 徐州: 中国矿业大学, 2014

    Sun Yuanyang.Preparation and tribological properties of silane mixed self-assembled monolayers[D]. Xuzhou: China University of Mining and Technology, 2014(in Chinese)
    [21]
    白涛.稀土复合纳米薄膜的制备及其摩擦学性能研究[D]. 上海: 上海交通大学, 2007

    Bai Tao. Preparation and tribological investigation of rare earth nanocomposite thin films[D]. Shanghai Jiao Tong University, 2007(in Chinese)
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