Preparation, Structure and Tribological Properties of MoS₂ Based Composite Films

MoS₂ based composite films were deposited using multiple targets magnetron sputtering method. The microstructure, mechanical and tribological properties of the films were investigated using the various analytical techniques. The results show that elements C and Ti in films effectively suppressed the growth of columnar structure and produced more compact films. Accordingly, composite films exhibited excellent mechanical properties and load-bearing capacity. In particular, among these composite films MoS₂+C+Ti film showed the highest hardness (7.43 GPa), elastic modulus (98.1 GPa) and elastic recovery (61.7 %), as well as the lowest wear rate about 4.67×10-17 m³/(N·m) in ambient air.