High Load Bearing Capacity and Low Friction of MoS₂/Ti Composite Films by Magnetron Sputtering

The MoS₂/Ti composite films with different Ti contents were produced by magnetron sputtering system. The mechanical and tribological performances of composite films were analyzed by scanning electron microscopy, atomic force microscopy, Nano-indenter, X-ray diffraction and CSM tribometer. Results showed that the structures of composite films were compact and dense, and the surfaces were smooth. The hardness of MoS₂/Ti composite film was higher than that of the pure MoS₂ film. The MoS₂/Ti composite films with low Ti contents presented the preferential orientation of (002) basal plane. For the MoS₂/Ti composite films with low Ti content,on the Hertz contact stress of 2.5 GPa in atmosphere,the friction coefficients were as low as 0.02 and the wear rates were on the order of magnitudes 10^-17 m³/(N·m). In addition, the films presented the high load bearing capaticy. The excellent tribological performances could be ascribed to two reasons: on the one hand,the mechanical properties and oxidation resistance were improved by doping Ti, on the other hand,the (002) basal plane played a significant role in the tribological performances of MoS₂/Ti composite films.