The Preparation and Tribological Properties of nc-TiC/a-C Nanocomposite Multilayer Films

nc-TiC/a-C nanocomposite multilayer films with different sub-layer thickness and sub-layer modulus ratio were deposited on single crystal silicon wafers by filtered cathodic arc (FCA) technique. X-ray diffraction,scanning electron microscope and transmission electron microscope was used to analysis the film's microstructure. Laser scanner was used to determine the intrinsic film stress. The tribological properties of the films were evaluated using a micro tribometer in order to study the effect of multilayer structure design on their friction-reducing and anti-wear performance. The results indicate that compared with monolayer film,multilayer films had lower intrinsic stress and better friction-reducing and anti-wear performance. When the sub-layer thickness was 40 nm and sub-layer modulus ratio was the smallest,the films had the best wear resistance.