Abstract: Occurrence mechanism of cavitation on lubricated textured surfaces was investigated preliminarily based on an expanded cavitation equation. In order to analyze the mechanism, the continuous convolution Fast Fourier Transform (CC-FFT) technology is used for calculating the surface deformation. Meanwhile, the computation code for cavitation analysis is validated. Numerical results reveal that the cavitation occurs easily at the disvergence of the dimple and the occurrence is close to the dimple amplitude and its position. The bigger the length-width ratio of fluid field, the wider the cavitation region bandwidth. With an increase in the dimple amplitude, the cavitated area will increase and then approach a stable value.