非平衡磁控溅射沉积MoS2-Ti 复合薄膜的结构与真空摩擦磨损性能研究
Study of Structure and Tribological Properties in Vacuum of MoS2-Ti Composite Coatings Deposited by Unbalanced Magnetron Sputtering system
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摘要: 采用非平衡磁控溅射法制备Mo S2-Ti 复合薄膜,采用SEM ?XRD 和XRF 对薄膜的结构进行表征,在真空球-盘摩擦试验机上评价试验载荷?转速以及基底材料种类对薄膜真空摩擦磨损性能的影响结果表明:Mo S2 -Ti 复合薄膜表面致密均匀,断面为细柱状结构,呈MoS2 (002 )基面择优取向,薄膜中T ,含量为8wt. % ,S: MO原子比为1.8 在真空度优于5xl0-3,Pa ?室温环境中,当试验载荷从5N 增加至20N 时,薄膜的摩擦系数和耐磨寿命都呈减小趋势,摩擦系数变化符合赫兹接触理论模型;当试验速度从250 r / min 提高至1 000 r / min 时,薄膜的摩擦系数逐渐减小,耐磨寿命变化量较小;不同基体材料上薄膜的摩擦系数平均值均为0.02 , 9Crl8 ?45 “钢和40Cr ,基材上薄膜耐磨寿命区别不大,在20 -25 km 之间,磨损形式为磨粒磨损,30CrMnsi 上薄膜耐磨寿命明显下降,只有10.3km ,磨损形式为黏着磨损,研究结果表明如果基底材料与摩擦对偶间发生黏着磨损,会明显降低其表面沉积薄膜的耐磨寿命Abstract: MoS2-Ti composite coatings are deposited by unbalanced magnetron sputtering system The structure of the coatings has been studied by using SEM , XRD and XRF The tribological behavior of the coatings changed with load , sliding speed and substrate materials 15 studied by using ball-on-disc tester in vacuum simulator The results show that MoS2-Ti composite coatings are dense and uniform , with the cross-section of which has close columnar structure XRD analysis reveals that the MoS2 :-Ti composite coatings are strong basal ( 002 ) planes crystal orientation .The Ti content in the coating is 8 wt. % and the atomic ratio of S to Mo is 1 .8 The tribological properties of the coatings are tested in vacuum environment where the pressure is under 5 x 10-3 Pa and normal temperature .The results show that when test load increases from 5 to ZON , the friction coefficient and wear life of the coatings all decrease When sliding speed increases from 250 to 1 000 r / min , the friction coefficient of the coatings decrease but the wear life of them are almost the same When deposited on different substrate materials , the friction coefficient of the coatings are consistent and the value is as low as 0 .02 .The wear life of the coatings deposited on 9Cr18 ?45 # steel and 4OCr are similar and between 20-25 km The wear mechanism of them appears to be particle wear The wear life of 3OCrMnsi sample 15 only 10.3 km , half of the others .The wear mechanism of it appears to be adhesive wear