MoS2/WS2共溅射复合薄膜的微结构及其摩擦磨损性能研究
Microstructure and Tribological Properties of Co-sputtered MoS2/WS2 Composite Films
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摘要: 采用磁控溅射共溅射法制备MoS2/WS2复合润滑薄膜,利用X射线衍射仪、X射线能谱仪及透射电子显微镜对薄膜的成分和结构进行分析,采用UMT-2MT型微摩擦磨损试验机在大气(相对湿度45%~50%)和室温(20~25 ℃)环境下评价薄膜的摩擦磨损性能.结果表明,MoS2/WS2复合薄膜结构致密,具有较好抗氧化性,其耐磨寿命、摩擦稳定性和抗载荷能力比MoS2磁控溅射薄膜均有显著提高,而摩擦系数更低.Abstract: MoS_2/WS_2 composite lubricating film was prepared by magnetron co-sputtering method.X-ray diffraction,energy dispersive X-ray detector and transmission electron microscopy were used to analyze the composition and microstructure of the films.The friction and wear behavior was performed on a reciprocating pin-on-disk tribometer at room temperature in air(RH=45%~50%).The composite film had a compact microstructure and therefore it improved oxidation resistance.As compared with pure MoS_2 film,the MoS_2/WS_2 composite film exhibited improved friction stability,wear durability and load-carrying capacity,and the composite film also revealed much lower friction coefficient.