ISSN   1004-0595

CN  62-1224/O4

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金属掺杂高硬度类石墨薄膜结构及其摩擦学性能研究

Microstructure and Tribological Performances of Highly Hard Graphite-like Carbon Films Doped with Different Metals

  • 摘要: 利用磁控溅射技术制备了不同金属(Ti、Cr、Zr)掺杂类石墨(graphite-like carbon, GLC)薄膜,考察了金属掺杂对薄膜结构及其在不同环境下摩擦学性能的影响。结果表明:Ti、Cr、Zr掺杂促进了GLC膜中sp2结构的增加,但过快的金属共沉积速率易使薄膜出现柱状生长取向而变得疏松粗糙;高硬GLC膜在大气及水环境中具有良好的环境自适应减摩抗磨作用特性,适当的金属掺杂可以提高GLC膜硬度并降低其干摩擦系数,但会使其水环境中摩擦系数升高;致密度和硬度对GLC膜耐磨性至关重要,致密而硬的膜层磨损轻微。

     

    Abstract: Graphite-like carbon (GLC) films doped with Ti, Cr and Zr were fabricated successfully using magnetron sputtering technique. The effects of metal doped on microstructure and tribological performance in different environment of GLC films were investigated systematically. Results showed that the content of sp2 bonds in GLC films increased when metals were doped,while the as-deposited metal doped GLC films were apt to form column-like structure when metals were deposited too fast, and then the films would be loose and rough. The highly hard GLC films exhibited excellent self-adapted friction reducing and antiwear properties both in ambient and water environment. If metals were doped properly, they would increase the hardness and decrease the friction coefficient in dry sliding condition for GLC films. While the friction coefficient of GLC film in water would increase after doping metals. The antiwear property of GLC films was highly related to the film density and hardness. Dense and hard films wear slightly.

     

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