ISSN   1004-0595

CN  62-1224/O4

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基于多功率源梯度过渡层的Si-DLC的制备及水润滑性能研究

Preparation and Tribological Properties in Water of Si-DLC Film with Gradient Interlayer Deposited by Muti-Power Source Technology

  • 摘要: 采用溅射、反应溅射与RF-CVD技术相结合的多功率源沉积了梯度过渡层,在此基础上用RF-CVD法沉积了掺硅类金刚石膜,研究了梯度过渡层对薄膜结构、力学性能及水中摩擦学性能的影响.结果表明:梯度过渡层的引入可在一定程度上提高薄膜的sp3成分含量、硬度和杨氏模量,对增强膜基结合力,提高薄膜在水中的抗剥落性能有较显著的效果.

     

    Abstract: A gradient interlayer was deposited on stainless steel disk and silicon wafer by RF-CVD assisted sputtering and reactive sputtering method. Sequentially, a Si-DLC film was deposited on the interlayer by RF-CVD. The effect of the interlayer on the characteristics and tribological behaviors in water of the film was investigated. The results show that the presence of the gradient interlayer increased the content of sp3 carbons as well as the hardness and the Young's Modulus of Si-DLC slightly. The Si-DLC film with gradient interlayer showed higher failure-resistant capability comparing with the film without gradient interlayer.

     

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