Abstract: In order to improve the hydrodynamic performance of dimpled face mechanical seals, an inclined elliptical dimpled face structure was proposed. Taking into consideration the cavitation of liquid film between the two faces, a mathematical model was proposed based on JFO cavitation boundary condition. Finite difference method was applied to solve Reynolds equation, from which the film pressure distribution of mechanical seal face was obtained. Comparative analysis was conducted on the influence of arrangement of elliptical dimples on seal performance. The results show that arrangement of elliptical dimples had a great influence on the seal performance. Dimples with downstream pumping function in high pressure side can effectively enhance the hydrodynamic effect, and dimples with upstream pumping function can greatly reduce the leakage rate whether they were located in high pressure side or in the low one. Arrangements with shape factor of γ=3~5, inclination angle α=35°~45°and β=125°~135°, showed the best hydrodynamic performance. Arrangements with shape factor of γ=3~5, inclination angle α=30°~50°and β=30°~50° gave the minimum leakage rate.