MPIIID制备TiAlN涂层的高温抗氧化及摩擦性能

High Temperature Oxidization Resistance and Wear Properties of TiAlN Coatings Deposited by MPIIID

摘要: 采用多源等离子体注入与沉积（MPIIID）装置制备了不同Al含量的TiAlN涂层，利用X射线能谱仪(EDX)、扫描电镜(SEM)、X射线衍射(XRD)、X射线光电子能谱(XPS)、纳米探针和摩擦试验对涂层的组成以及高温抗氧化和摩擦性能进行分析。结果表明：Al元素的加入明显提高了涂层的高温抗氧化能力，生成的Al2O3能有效地抑制氧的扩散；当Al的质量百分数为6.18%时，涂层硬度最高，约为38GPa，涂层具有良好的摩擦磨损特性。

Abstract: TiAlN coatings with different Al contents were prepared by multi-plasma immersion ion implantation and deposition (MPIIID).The high temperature oxidization resistance and wear properties of these coatings were investigated by energy dispersive X-ray (EDX), scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nano-indentation, friction tests. Results revealed that TiAlN coating possessed better oxidation resistance because a protective Al2O3 layer can effectively inhibit the diffusion of oxygen into the coating. When the concerntration of Al reached 6.18 %, the coating had the highest hardness of 38 GPa and excellent wear resistance.