ISSN   1004-0595

CN  62-1224/O4

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磁控溅射TiN界面结合强度的压痕法测试

Measurement of Bonding Strength of Magnetic Sputtered TiN Coatings by Indentation Method

  • 摘要: 在试验的基础上提出了测量TiN涂层界面结合强度的弹塑性赫兹接触应力经验修正公式,作为实例测量了不同基体表面粗糙度对磁控溅射沉积的TiN涂层界面结合强度的影响,将测量结果与其它测量方法所得结果进行比较,证明提出的方法切实可行。

     

    Abstract: The modified formula for calculation of elasto plastic Hertzian contact stress was established. The formula was adopted to calculate the bonding strength of magnetic sputtered TiN coatings and compared with the experimental one. At the same time, the factors affecting the bonding strength of the coatings are discussed as well. As the results, the bonding strength of magnetic sputtered TiN coatings is greatly affected by the substrate surface roughness. In comparison with the other methods for measurement of the bonding strength of coatings, the current method has been found to be applicable and convenient for the bonding strength evaluation of coatings.

     

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