掺杂不同钛含量氮化锆薄膜的制备

Tribological Performance of ZrN Ceramic Thin Films with Ti Additions

摘要: 采用非平衡磁控溅射技术制备含不同钛含量的氮化锆（Zr-Ti—N）复合薄膜材料，并研究薄膜基本特性及其摩擦磨损性能．结果表明：随着Ti含量增加，Zr—Ti—N薄膜硬度有所提高；在Ti含量为18．7at．％时，薄膜的硬度达到最大值2483HK0.025；当添加16．5at．％Ti时，硬度值略有降低，但临界载荷最高，耐磨性最佳．

Abstract: Using the unbalanced magnetron sputtering method, ZrN thin films with addition of varying content of Ti, namely Zr-Ti-N, were obtained, and then were characterized and studied for wear resistance. As the Ti content increased, the hardness increased, reaching a maximum value 2483HK0.025 at 18.7 at. % Ti. However, the film with addition of 16.5 at. % Ti showed the best wear performance and the highest critical loads.