Abstract: Au nanoparticle-textured surfaces were prepared on the silicon (100) surfaces by using the self-assembly techniques. The atomic force microscope (AFM) and UMT-2MT tribometer were used to examine the adhesion and friction mechanisms in micro-/nano-scales of nanoparticle-textured surfaces. The results showed that: in textured surfaces with low texture densities, the continuum contact mechanics model was found to be applicable to the surface contact between the tip and the textured surfaces in nano-scale. While in the higher texture density surfaces, the surface contact mechanic between the tip and Au nanoparticle-textured surfaces followed the multi-asperity contact model which effectively reduced the contact area, accordingly reducing the adhesion and friction. Compared with the smooth surface of silicon, the adhesion force of the Au NPTS at assembling time of 3.0 h was reduced by 77%, and the friction force of the Au NPTS at assembling time of 3.0 h was reduced by 42% under the normal load of 7 nN.