Abstract: This paper indicates that the surface topography plays an important role in the operational performances of the mechanicals electronic and optical systems especially during producing the modern products, exactly measuring surface topography has become an essential requrement for controlling and improving the quality of processing surface. After evaluating the contact measurement of surface topography, the misphasin;; interference microscope and scanning turneling microscopy's measuring principle and structures were introduced. These instruments principally were used for noncontact measurement of surface topography. The author considered that the double light beam interference microscope had the advantages of easy to operate and measuring rapidity, therefore it was a noncontact precision tester for observing microtopography of surface; the scanning turaeling microscope was a new generation mic-rotester with very high-resolution(its vertical and horizontal resolutions were 0.1 A and 5A respectively), it was developed subsequent to optical microscope and electron microscope, so it has become one of the most effective tool for researching three dimensional structure of the solid surface topography.