Abstract: TiBxNy coating were deposited on polished system. The phase configuration and chemical ingredi Si wafers in a reactive unbalanced dc magnetron sputtering ent of TiBxNy coating were analyzed by X-ray diffraction and X-ray photoelectron spectroscopy. Dry sliding wear behavior of TiBxNy coating was studied using pin-on-disk tribometer, while wear debris and worn surface configuration and chemical character were investigated using optical line TiN. The frictional coefficient and wear rate were related to the phase configuration. Increasement of TiN increased frictional coefficient and decreased wear rate. When N content was about 37at. %, TiN fraction reached maximum, the friction coefficient reached maximum and the wear rate reached minimum. Increasement of N Fraction was helpful for the formation of h-BN, and the BN phase increased with the increasement of N content. The formation of BN phase decreased frictional coefficient and increased wear rate. Oxidation of wear debris took place during sliding, as a result it formed wear debris comprised of various types of Ti oxides including TiO, TiO2, Ti2O3, and B oxide which increased wear resistance.