离子注入对SiO2表面非晶碳薄膜的化学状态及摩擦学性能的影响
Effect of Ion Implantation on the Interface Chemical States a nd Tribological Behavior of Amorphous Carbon Film on SiO2 Substrate
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摘要: 采用真空蒸镀法在SiO
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引用本文: | 离子注入对SiO2表面非晶碳薄膜的化学状态及摩擦学性能的影响[J]. 摩擦学学报, 2001, 21(1): 6-9. |
Citation: | Effect of Ion Implantation on the Interface Chemical States a nd Tribological Behavior of Amorphous Carbon Film on SiO2 Substrate[J]. TRIBOLOGY, 2001, 21(1): 6-9. |