类金刚石碳膜的摩擦学特性及其研究进展

Tribological Properties and the Current State of Tribological Investigation of Diamond-like Carbon Films

摘要: 从类金刚石碳膜作为耐磨涂层的角度出发，综述了近年来国际上关于类金刚石碳膜摩擦学特性的大量研究，着重讨论了影响类金刚石碳膜摩擦学特性的主要工艺参数和因素，阐明了类金刚石碳膜与金刚石膜在性能上的差异，指出了类金刚石碳膜的发展现状和趋势。

Abstract: Diamond like carbon (DLC) films have attracted significant attention recently owing to the desirable properties. A review is given of the friction behavior of DLC films and of the research progress of the tribological behavior of DLC films. The ambient factors and the difference in the DLC film structure which have effect on friction behavior of DLC films are discussed. The topics for further study have been suggested as well.