Abstract: The topography and structure of MoSa-Au co-sputtered films were analysed by means of SEM, XRD, AES and XPS. The MoS2-Au films possessed a close columnar structure. The oxidation of these films were slower in moisture environment than that of MoSz films, and the wear life increased with increasing of film thickness. It was shown that good performance was related to the close columnar structure of the MoSj-Au films. The influence of argon pressure during sputtering on structure and performance of MoSj-Au co-sputtered films was tested. The results showed, under different argon pressures, different crystallinities of MoSz and tri-bological properties were obtained. Sputtering at argon pressure of 11.0 Pa, the wear life of the film was the longest, and the structure was crystalline with stochastic orientation. The amophous structure films was produced at argon pressure of 5.3 Pa. Its wear life were short and the friction coefficient was unsteady and higher. A corresponding relation existed in the adhesion between film and substrate and the wear life of co-sputtered film. The influence of surface defects of substrate on structure of film was also discussed.