Al/AlN多层膜的摩擦磨损性能研究

基金项目:

甘肃兰州理工大学有色金属新材料国家重点实验室(培育基地)开放课题，国家自然科学基金

Study on Tribological Behavior of Al/AlN Multilayers

摘要: 采用柱状靶磁控溅射系统制备Al/AlN纳米多层膜,采用纳米压痕仪测量Al/AlN纳米多层膜的纳米硬度,在UMT-2M型摩擦磨损试验机上评价其摩擦磨损性能.结果表明:当AlN层较厚时,薄膜在很短时间内被磨穿;调节Al/AlN层厚比为2.9/1.1时,薄膜的摩擦磨损性能明显提高;当保持Al/AlN层厚比为2.9/1.1、变化多层膜的调制周期时,薄膜的摩擦系数较低,但硬度较低的薄膜由于承载能力不够,不能够保持优良的摩擦磨损性能.
- 磁控溅射 /
- Al/AlN多层膜 /
- 摩擦磨损性能
Abstract: Al/AIN muhilayers were prepared by cylindrical DC magnetron sputtering method. The hardness of the Al/AIN multilayer films was determined using a nano-indentation tester. The wear properties of the films were measured by a UMT-2MT tester in reciprocating mode. The tribological properties of the Al/AIN multilayers showed obvious enhancement in the Al/AIN layer thickness ratio of 2.9/1.1 compared to the thick AIN layer in modulation period. With the same Al/AIN layer thickness ratio but varying modulation period, the film exhibited low friction coefficient, but it also exhibited poor tribological performance at high load due to its low hardness.
- magnetron sputtering /
- Al/AIN multilayer /
- friction and wear behavior