Abstract: Human industrial technology is gradually advancing towards atomic-scale manufacturing. Tribological parameters at the surface-interfaces during the manufacturing process at the atomic scale significantly affect the efficiency and quality of processing. Especially in atomic-scale manufacturing techniques driven by mechanical behavior, friction has become a critical factor affecting precision and product quality. As the increasing demands of the atomic-scale manufacturing industry for mass production techniques and highly consistent processes, the impact of tribology on atomic-scale manufactured products is becoming more prominent. In this article, the effects of frictional and wear behavior on atomic-scale removal and manipulation were described around three atomic-scale manufacturing techniques driven by mechanical behavior: atomic-layer polishing, atomic-level cutting, and atomic manipulation. The tribological problems and technical problems of friction and wear behavior control in the field of mechanically driven atomic-scale manufacturing was summarized, and the cutting-edge research directions and goals of tribology in atomic-scale manufacturing technology was discussed.