ISSN   1004-0595

CN  62-1224/O4

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B4C&H-DLC薄膜在过氧化氢溶液中的摩擦学行为研究

Tribological Behavior of B4C&H-DLC Films in Hydrogen Peroxide Solution

  • 摘要: 采用闭合场非平衡磁控溅射技术在316L不锈钢表面沉积硼、氢掺杂类金刚石碳(B4C&H-DLC)薄膜,利用扫描电镜(SEM)、Raman、X射线光电子能谱仪(XPS)、纳米压痕和线性往复摩擦试验机等系统分析了B4C&H-DLC薄膜的结构、力学性能及过氧化氢水溶液中与不同对偶球的摩擦学行为. 结果表明:B4C&H-DLC薄膜在过氧化氢环境中与Al2O3球相对摩擦时,有严重的磨粒磨损行为,摩擦系数与磨损率较高. 此外,B4C&H-DLC薄膜在过氧化氢环境中与Si3N4和SiC球相对摩擦时发生了复杂的摩擦化学反应,形成了硅胶和硼酸的摩擦化学产物,发挥了减摩抗磨作用磨损率较低分别为0.8×10−7和1.0×10−7 mm3/(N·m). 因此,本研究为碳基薄膜在氧化条件下摩擦副的合理设计和应用提供了试验依据,同时也为保护在苛刻环境工作的机械部件提供了1种可行方法.

     

    Abstract: In both industry and daily life, hydrogen peroxide is frequently used. When used in the oxidizing environment of hydrogen peroxide, ceramic and stainless steel parts are vulnerable to excessive wear or premature failure. Al2O3 does not react with diamond-like carbon sheets during friction because of its stable characteristics. Increasing its friction chemical components is one of the most efficient ways to further reduce the friction coefficient and wear rate. According to studies, the interaction between Si3N4 and SiC balls generated lubricating chemical substances that reduced friction. In order to investigate the influence of Si elements in the friction process with diamond-like carbon-based films in a hydrogen peroxide environment, SiC and Si3N4 balls were chosen as dual balls. As a consequence, silicon wafers and 316L stainless steel had been covered with boron and hydrogen-doped diamond-like carbon (B4C&H-DLC) thin films using a closed-field unbalanced magnetron sputtering approach. Using a ball-and-disk linear reciprocating friction tester, the tribological characteristics of three distinct dual balls (Al2O3, Si3N4, and SiC) with B4C&DLC thin films in a hydrogen peroxide environment had been compared. Through the use of SEM, Raman, XPS, nanoindentation, and three-dimensional profilometer methods of testing, the structural and mechanical characteristics of the B4C&DLC films as well as the changes in the chemical composition and structure of the films before and after friction were also investigated. The mechanisms of B4C&DLC films' wear and friction when rubbing on Si3N4 and SiC were emphasized. The results of this study demonstrated that the B4C&DLC films, when compared to pure DLC, had superior mechanical properties, with hardness and elastic modulus values of 30.6 and 263.0 GPa, respectively. When friction was applied on Al2O3 spheres with dual balls in a hydrogen peroxide the environment, the B4C&DLC films exhibited a severe abrasive wear behavior resulting from the greater Hertz pressure and micro-cutting effect. After the B4C&H-DLC thin films were friction-matched with Si3N4 and SiC dual balls in a solution of hydrogen peroxide environment, the surface chemical state of the friction sub-wear spot region was further determined by X-ray photoelectron spectroscopy. It was discovered that during friction with the B4C&H-DLC films, the Si3N4 and SiC dyadic spheres underwent intricate friction chemical processed that produced silica and boric acid friction chemical products which exhibited friction-reducing and anti-wear effects. The films' friction coefficients were reduced to between 0.05 and 0.06, and their wear rates to between 0.8 × 10−7 and 1.0 × 10−7 mm3/(N·m), respectively. As a result, the present research had demonstrated the friction and wear characteristics of the B4C&DLC films in an aqueous hydrogen peroxide solution. It provided an experimental foundation for the realistic development and use of carbon-based thin films' friction vice under oxidizing conditions as well as an appropriate approach for protecting mechanical parts exposed to extreme conditions.

     

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