Abstract: The hydrogenated amorphous carbon films were deposited by plasma enhanced chemical vapor deposition system. When the films were heated at the objective temperature, the liquid nitrogen was used for shock chilling. The structures, mechanical and frictional performances variation of the hydrogenated amorphous carbon films were investigated. The results suggest that hardness of films gradually increased with liquid nitrogen shock chilling at 200~300 ℃, and decreased liquid nitrogen shock chilling at 350~400 ℃. The elastic recovery and C-C sp² bond increased in all experiment. The friction coefficients and wear volumes were all reduced after liquid nitrogen shock chilling, particularly under the temperature of 300 ℃ which showed the minimum of friction coefficient and wear volume.