Abstract: Chromium oxide thin film was deposited on GH-4169 alloy by arc ion plating (AIP). The effects of annealing temperature (500 ℃, 600 ℃, 700 ℃ and 800 ℃) on morphology, structure, mechanical properties and tribological properties were studied . The results showed that the chromium oxide film presented a decreasing defect density and hardness, and gradually perfect crystallinity, as the annealing temperature increased. In addition, chromium oxide films annealing at different temperatures presented different high temperature tribological properties: chromium oxide films annealing at 500 ℃ and 600 ℃ showed a higher friction coefficient than one as-deposited from 25 ℃ to 800 ℃; chromium oxide films annealing at 800 ℃ showed a relatively low friction coefficient from 400 ℃ to 600 ℃, while a high friction coefficient (>0.4) at room temperature, which indicated a obvious fluctuation over a wide range of temperature; chromium oxide films annealing at 700 ℃ showed a stable friction coefficient (0.21~0.33) from 25 ℃ to 800 ℃.