Abstract: Based on the microscale flow characteristics of dry gas seal, an ordered microstructure dry gas seal model was proposed, which provided a new reference for laser surface texture while improving sealing performance. Two kinds of classic groove - spiral groove and T groove were selected as the research object for simulation analysis. The correctness of the calculation method was verified by literature comparison. Based on the optimal micro-modeling, the performance analysis and comparison of micro-modeling were carried out. The results show that, under the same working condition, the opening force of the microstructure was significantly improved compared with the traditional structure, and the lifting amount was more significant at high speed, high pressure and micro-scale. Because of the symmetry of T groove, the microstructure of T groove had a certain leakage reduction effect, and the leakage reduction effect was more obvious with the increase of film thickness. The microstructure depth, quantity and area had a great influence on the sealing performance. There existed an optimal groove depth (spiral groove and T groove were 5.5 and 2.5 μm respectively) and a microstructure depth interval (both spiral groove and T groove were 0.9~1.2 μm) that made the opening force larger and the leakage smaller. It had good supercharging performance of microstructure, which was helpful to further improve the stability of dry gas seal.