ISSN   1004-0595

CN  62-1224/O4

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Ti过渡层对NbSe2薄膜润滑-导电性能的影响

The Effect of Ti Transition Layer on Lubrication-Conduction Properties of NbSe2 Films

  • 摘要: 采用射频磁控溅射技术制备了系列金属钛(Ti)为过渡层的NbSe2薄膜,分析了Ti过渡层的厚度对薄膜成分、结构和机械性能的影响,并研究了在大气环境下薄膜的润滑-导电性能. 结果表明:改变Ti过渡层的厚度,可实现对薄膜中Se/Nb原子比和结晶度的调控. 随着Ti过渡层厚度的增加,薄膜的致密度、膜-基结合强度及力学性能得到了明显改善. 同时,NbSe2薄膜维持原有(002)面择优取向,这利于薄膜的侧向滑移,从而提升了薄膜的减摩耐磨性能. 然而,过厚的Ti过渡层会导致薄膜中Se/Nb原子比和结晶度下降,致使薄膜中游离金属元素含量升高. Ti过渡层的厚度超过30 nm时,虽然薄膜的结构仍然致密,且导电性能也有所增强,但其减摩耐磨性能却明显减弱. 可见,适当厚度的Ti过渡层,才有助于提高NbSe2薄膜的润滑-导电性能.

     

    Abstract: Ti-NbSe2 films were deposited by radio frequency magnetron sputtering. The composition and structures were characterized by X-ray photoelectron spectrum (XPS), X-ray energy dispersive spectrum (EDS), X-ray diffraction (XRD) and field-emission scanning electron Microscope (FE-SEM). The mechanical and tribological properties were measured by nano-Triboindenter and tribometer in ball-on-disk. The static contact resistance was investigated by four-probe-meter. The results showed that the Ti transition layer could regulate the Se/Nb atomic ratio and crystallinity into the films. The adhesion strength of the film-substrate and the mechanical properties of films were improved distinctly with the increased thickness of Ti transition layer, and the films showed the remarkable NbSe2 (002) plane which are beneficial for lubrication-conduction capabilities of NbSe2 films. However, when the thicknesses of Ti layer exceeded the optimum 30 nm, Se/Nb atomic ratio and the crystallinity in the films reduced, whereas the amorphous metal increased in this stage. Furthermore, while the electrical conductivity property enhanced, the tribological property of the films deteriorated dramatically. As a result, a suitable thickness (30 nm) of Ti transition layer can properly promote the lubrication-conduction properties of NbSe2 films.

     

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