Cr/Cr<sub>2</sub>O<sub>3</sub>多层薄膜的制备、力学及摩擦学性能研究

Cr/Cr₂O₃多层薄膜的制备、力学及摩擦学性能研究

摘要: 为了提高Cr₂O₃陶瓷薄膜的韧性及摩擦学性能,设计制备了Cr/Cr₂O₃软硬交替的多层薄膜,通过复配韧性层提高Cr₂O₃陶瓷薄膜的韧性及摩擦学性能,同时研究了调制周期对Cr/Cr₂O₃薄膜力学性能及摩擦学性能的影响.研究结果表明多层薄膜的韧性和第一临界载荷随调制周期的减小而增大,而其硬度随调制周期的减小而降低.调制周期为1075 nm的薄膜表现出了最好的综合性能,即薄膜具有较好的膜基结合强度、较高的韧性和硬度,同时薄膜具有最好的抗磨损性能.

Abstract: In this study, the soft and hard alternative modulation structure was designed in order to improve the toughness and tribological properties of single layer Cr₂O₃ films. Moreover, the effects of modulation periods on mechanical and tribological properties were investigated. The result shows that the toughness and the first critical load increased with the decreased modulation period. The hardness decreased with the decreased modulation period. The film with modulation period of 1075 nm showed good comprehensive properties, i.e. higher hardness, toughness and adherence strength. And this film exhibited the best wear-resistant performance.