Abstract: In this study, the soft and hard alternative modulation structure was designed in order to improve the toughness and tribological properties of single layer Cr₂O₃ films. Moreover, the effects of modulation periods on mechanical and tribological properties were investigated. The result shows that the toughness and the first critical load increased with the decreased modulation period. The hardness decreased with the decreased modulation period. The film with modulation period of 1075 nm showed good comprehensive properties, i.e. higher hardness, toughness and adherence strength. And this film exhibited the best wear-resistant performance.