ISSN   1004-0595

CN  62-1224/O4

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磁控溅射沉积高承载、低摩擦MoS2/Ti复合薄膜

High Load Bearing Capacity and Low Friction of MoS2/Ti Composite Films by Magnetron Sputtering

  • 摘要: 采用磁控溅射技术制备了不同Ti含量的MoS2/Ti复合薄膜,利用SEM、AFM、纳米压痕仪、XRD和CSM摩擦试验机分析了复合薄膜的结构、力学和摩擦学性能.结果表明:复合薄膜结构致密,表面光滑平整,且具有较高的硬度,Ti含量较低的MoS2/Ti复合薄膜呈现以(002)基面为主的择优取向;在大气环境下,赫兹接触应力为2.5 GPa的摩擦工况下,Ti含量较低的MoS2/Ti复合薄膜的摩擦系数低至0.02,磨损率低至10-17 m3/(N·m)数量级,呈现出高承载、低摩擦、耐磨损的优异摩擦学性能.这是由于Ti的掺杂一方面提高了复合薄膜的力学和抗氧化性能,另一方面复合薄膜的(002)基面取向对其摩擦磨损性能发挥了重要作用.

     

    Abstract: The MoS2/Ti composite films with different Ti contents were produced by magnetron sputtering system. The mechanical and tribological performances of composite films were analyzed by scanning electron microscopy, atomic force microscopy, Nano-indenter, X-ray diffraction and CSM tribometer. Results showed that the structures of composite films were compact and dense, and the surfaces were smooth. The hardness of MoS2/Ti composite film was higher than that of the pure MoS2 film. The MoS2/Ti composite films with low Ti contents presented the preferential orientation of (002) basal plane. For the MoS2/Ti composite films with low Ti content,on the Hertz contact stress of 2.5 GPa in atmosphere,the friction coefficients were as low as 0.02 and the wear rates were on the order of magnitudes 10-17 m3/(N·m). In addition, the films presented the high load bearing capaticy. The excellent tribological performances could be ascribed to two reasons: on the one hand,the mechanical properties and oxidation resistance were improved by doping Ti, on the other hand,the (002) basal plane played a significant role in the tribological performances of MoS2/Ti composite films.

     

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