ISSN   1004-0595

CN  62-1224/O4

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工作气压对TiN涂层的结构、力学性能及摩擦学性能的影响

The Influence of Working Pressure on the Structure, Mechanical Properties, and Tribological Properties of TiN Coatings

  • 摘要: 采用高功率脉冲磁控溅射(HiPIMS)技术于9Cr18钢等基材沉积了TiN涂层,系统地研究不同工作气压对涂层结构、力学性能及摩擦学性能的影响. 随工作气压增加,TiN涂层表面光滑平整,致密度先上升后下降,但涂层均呈现出致密的截面形貌. TiN涂层的择优取向为(111)面. 涂层中的元素原子分数分布均匀,N元素含量在70 %左右. 当工作气压为0.7 Pa时,涂层具有最高的硬度(约为30 GPa)和弹性模量(约为280.6 GPa),同时表现出优异的抗断裂能力,H/E比值为0.106,在氮化物涂层中具有显著优势. 随工作气压的上升,涂层与基体之间结合强度逐渐提高,当工作气压为0.94 Pa时,涂层表现出最高的膜-基结合强度(约为52 N). 不同工作气压下涂层的平均摩擦系数相接近,最低为0.115,当工作气压为0.7 Pa时,涂层表现出最低的磨损率,约为1.93×10−7 mm3/(N·m).

     

    Abstract: Abatract: TiN coatings were deposited on substrates such as 9Cr18 steel using high-power pulsed magnetron sputtering (HiPIMS) technology. The variation of working pressures on microstructure, mechanical properties, and tribological properties of the coatings were systematically studied. As the working pressure increased, the surface of TiN coating became smooth and flat, resulting in an the surface density of the coatings first increase and then decrease, but the cross-sectional morphology of the coating all exhibited the dense structure. The preferred orientation of TiN coatings always were the (111) plane and the element content in the coating was evenly distributed, with an N element content of around 70 %. When the working pressure was 0.7 Pa, the coating had the highest hardness (about 30 GPa) and the elastic modulus of it (about 280.6 GPa). At the same time, the coating exhibited excellent fracture resistance with H/E ratio of 0.106, showing significant advantages in the nitride coatings. As the working pressure increased, the adhesion strength between the coatings and the substrate gradually increases. When the working pressure was 0.94 Pa, the coating exhibited the highest adhesion strength (about 52 N) between the coatings and the substrate. Besides, the friction coefficient of coatings under different working pressures were similar, and the minimum friction coefficient of coatings was 0.115. When the working pressure was 0.7 Pa, the coating exhibited the lowest wear rate about 1.93×10−7 mm3/(N·m).

     

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