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Effects of Carrier Gas on the Formation and Tribological Performance of BN Films Deposited by PCVD[J]. TRIBOLOGY, 1999, 19(2): 117-121.
Citation: Effects of Carrier Gas on the Formation and Tribological Performance of BN Films Deposited by PCVD[J]. TRIBOLOGY, 1999, 19(2): 117-121.
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Effects of Carrier Gas on the Formation and Tribological Performance of BN Films Deposited by PCVD

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